Senior Equipment Engineer Lithography

Want to make your mark on our time? Become a Senior Equipment Engineer Lithography at TNO in Eindhoven!

About this position

At the forefront of Europe’s photonics innovation, TNO is building a state-of-the-art pilot line for Indium Phosphide (InP) photonic chips at the High Tech Campus in Eindhoven. As part of the EU-funded PIXEurope program, this pilot line will enable the transition from groundbreaking research to large-scale industrial manufacturing, making advanced photonic technologies faster, more reliable, and widely accessible. To realize this ambition, we are looking for a Senior Equipment Engineer Lithography with deep expertise in DUV lithography. In this role, you are responsible for the availability, reliability, and performance of lithography equipment used in wafer-scale manufacturing. With your experience in lithography optimization, resist processes, and metrology, you ensure that the equipment operates at peak performance and reliably supports process development and production.

What will be your role?

As Senior Equipment Engineer Lithography, you take full ownership of lithography equipment in a high-tech cleanroom environment. You are responsible for installation, maintenance, upgrades, and long-term performance of the tools. Working closely with process engineers, operators, and suppliers, you ensure stable operation, high uptime, and safe use of lithography equipment across multiple tools.

Key responsibilities include:

• Overseeing installation, modification, upgrades, and preventive/corrective maintenance of lithography equipment, including Deep-UV scanner systems, i-line steppers systems and automated coating and development tracks.
• Leading new tool introduction projects, including tool selection, FAT/SAT, acceptance, and release to production.
• Ensuring high equipment availability and reliability through structured maintenance, health monitoring, and performance tracking.
• Troubleshooting complex equipment-related malfunctions and independently implementing sustainable solutions.
• Supporting lithography optimization and resist processes from an equipment performance perspective.
• Working with lithography-related metrology tools such as CD-SEM, profilometers, and similar systems to support tool qualification and monitoring.
• Coordinating with suppliers on service activities, upgrades, spare parts, and long-term roadmap development.
• Ensuring compliance with safety, cleanroom, and environmental regulations, and maintaining accurate technical documentation.
• Coaching and mentoring junior engineers and technicians, acting as a technical point of contact within the team.
• Actively contributing to continuous improvement initiatives within the equipment engineering domain.

What we expect from you

You are a senior equipment engineer with extensive experience in semiconductor manufacturing environments. You combine hands-on technical expertise with ownership, leadership, and a structured problem-solving approach. You feel comfortable taking responsibility for complex toolsets and supporting high-tech wafer manufacturing.

You also bring the following qualifications:

• A successfully completed BSc or MBO degree in a relevant technical field.
• 12+ years of relevant experience, including leadership experience.
• Proven experience with semiconductor-related equipment in wafer manufacturing and cleanroom environments.
• Demonstrated ownership of equipment, including new tool installations, acceptance, release to production, and lifecycle management.
• Experience with preventive and corrective maintenance, equipment health monitoring, and performance improvement.
• Hands-on experience with lithography optimization and resist processes from an equipment engineering perspective.
• Experience working with lithography-related metrology tools such as CD-SEM, profilometers, or similar systems.
• Strong troubleshooting skills, with the ability to independently resolve complex equipment malfunctions.
• Experience in vendor management, roadmap development, and cross-functional collaboration.
• A mentoring mindset, acting as a coach, team reference, and knowledge holder within the equipment engineering team.
• Clear communication skills, a proactive attitude, and a strong sense of ownership.

What you'll get in return

Challenging and varied work with a real impact. And plenty of opportunities as, at TNO, you are in charge of shaping your career. We offer a gross monthly salary (based on your knowledge and experience), 8% holiday pay, a 13th month bonus of 8.33% and a flex budget (5.58% + € 180). In addition, you will be given every opportunity to develop yourself.

TNO offers optional employee benefits, enabling you to tailor your benefits package to match your personal situation. You may also expect:

• An extremely professional, innovative working environment where colleagues are leading experts in their field.
• The opportunity to attend courses, workshops and conferences, and to receive training and coaching based on your needs.
• 33 days annual leave on a full-time basis.
• We offer a comprehensive and flexible mobility plan that also includes full compensation for public transportation for commuting and business travel.
• Great social events with your team and other TNO colleagues. That’s how you will get to know a lot of people really quickly.
• Flexible working hours, the possibility to work parttime (32 of 36 hours) and the possibility of working from home.
• Extensive relocation package for international candidates.
• A good pension scheme.

TNO as an employer

At TNO, we innovate for a healthier, safer and more sustainable life. And for a strong economy. Since 1932, we have been making knowledge and technology available for the common good. We find each other in wonder and ingenuity. We are driven to push boundaries. There is all the space and support for your talent and ambition. You work with people who will challenge you: who inspire you and want to learn from you. Our state-of-the-art facilities are there to realize your vision. What you do at TNO matters: impact makes the difference. Because with every innovation you contribute to tomorrow’s world.