Physics | Mechanical Engineering internship: nanoparticle metrology development

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Internship Opportunity: Development of Metrology Methods for Particle Detection in Lithography

Introduction

ASML Twinscan NXE lithography machines use reflective optics to generate an image of the pattern to be printed on the silicon wafer. To make sure that the image does not contain any defects, it's critical to minimize particle transport into the beam path. The EUV Defectivity cluster is responsible for making sure that this effect is reduced. For this internship, you will be working together with development engineers in the Scanner Plasma Group of this cluster.

Your Assignment

In this internship project, you will work on the development of a metrology method to detect, measure, and track nano-particles. The internship will focus on optical and non-optical techniques, such as scatterometry, TOF filtering, quartz crystal microbalance, and others. There are a number of strict requirements imposed on the right metrology. A key challenge for you in this internship is building knowledge in multiple fields of study, including optics, transport phenomena, plasma physics, and statistics. Your work will enable us to judge what measures are effective against particle contamination in lithography scanners.

• Analyze the problem statement and define technical specifications
• Conduct a literature review to identify viable metrology techniques
• Create a trade-off table to evaluate candidate solutions
• Develop theoretical models to validate feasibility
• Design and build a test setup for selected techniques
• Perform initial experiments and analyze results
• Collaborate with internal experts and university supervisors to ensure scientific rigor

This is a master internship for a minimum of 6 months, working 4 days per week (at least 3 days onsite). It is also possible to perform this project as a master graduation internship for 9 months. The start date is as soon as possible or the latest around January/February 2026.

Your Profile

• Are pursuing a master’s degree in Applied Physics, Mechanical Engineering, Aerospace Engineering, or a related field
• Have experience working with experimental setups
• Possess strong programming skills in MATLAB or Python
• Are proactive, collaborative, and analytical
• Communicate fluently in English, both verbally and in writing

Other requirements you need to meet:

• You are enrolled at an educational institute for the entire duration of the internship
• You need to be located in the Netherlands to be able to perform your internship. If you are currently living/studying outside of the Netherlands, your CV/motivation letter includes the willingness to relocate
• If you are a non-EU citizen studying in the Netherlands, your university is willing to sign the documents relevant for doing an internship (i.e., Nuffic agreement)

About ASML

ASML is a leading supplier of lithography equipment, used by the world’s top chipmakers to print microchips that are increasingly powerful, fast, and energy efficient. Working at ASML is inspiring, no matter what field you're in. We push the boundaries of technology: if it’s moving the world forward, chances are, we’re behind it. In fact, we’re probably a part of the electronic device you’re using right now. We’re a global team of more than 32,000 people from 122 different nationalities and counting. Headquartered in Europe’s top tech hub, the Brainport Eindhoven region in the Netherlands, our operations are spread across Europe, Asia, and the US.