Physics | Engineering internship: electron optical sensitivity simulations

Join ASML’s Delft Team: Multi-Beam Electron Microscope Internship

Introduction

At ASML’s Delft office, we are developing a multi-beam electron microscope for inspecting semiconductor wafers during production. A key component of this system is a micro-electromechanical (MEMS) module, which helps shape and direct the electron beams. Just as small imperfections in lenses or mounts can affect the performance of an optical system, manufacturing tolerances in the MEMS module can influence the behavior of the electron optics. Understanding how these tolerances affect system performance is essential for robust design.

Your assignment

As an intern, you will collaborate with our design team to investigate how manufacturing variations, such as small displacements or geometrical imperfections, impact the performance of the MEMS module.

• Adapt and parameterize an existing simulation model to include these variations and analyze their influence on electron beam focus and alignment.
• Identify which types of deviations are most critical and how they interact.

This is a master internship with a minimum duration of 5 months and a minimum of 4 days per week (3 days on-site). The start date of this internship is February 2026 (or earlier).

Your Profile

To be a match for this internship, you:

• Have a background in physics, electrical engineering, or a related field.
• Are comfortable working with simulation tools, like Python, and have an interest in electron optics.
• Familiarity with concepts from light optics or opto-mechanics will be helpful, as many principles carry over.
• Are curious, analytical, and eager to contribute to a team working on complex and impactful technology.

Other requirements you need to meet

• You are enrolled at an educational institute for the entire duration of the internship.
• You need to be located in the Netherlands to perform your internship. If you are currently living or studying outside of the Netherlands, your CV/motivation letter should include your willingness to relocate.
• If you are a non-EU citizen studying in the Netherlands, your university must be willing to sign the documents relevant for doing an internship (i.e., Nuffic agreement).

This position requires access to controlled technology, as defined in the United States Export Administration Regulations (15 C.F.R. § 730, et seq.). Qualified candidates must be legally authorized to access such controlled technology prior to beginning work. Business demands may require ASML to proceed with candidates who are immediately eligible to access controlled technology.