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Introduction
The MX (Metrology and Machine Control) cluster provides the supervisory control, modelling and optimisation algorithms to the Twinscan range of platforms. Within this cluster, the levelling department is responsible for vertical measurement of the wafer surface relative to fiducials in the system.
As part of the operation of the Twinscan, there are fiducial plates that are measured every time a new wafer is loaded, to ensure the position of the sensors relative to the wafer chuck. However, at the nanometer scale, these plates can become contaminated, and also microscopic water droplets can be left on them by the immersion system. In order to get the best positional measurement, these undesired effects must be identified and removed. While we have an algorithm that performs this, we are always looking for improvements.
In this internship, you will work with domain experts to investigate the use of a Deep Learning Surrogate (DLS) in place of the current algorithm.
Key deliverables include:
This is a (preferably) master or university bachelor internship (also suited for a thesis internship) for a minimum of 5 months, minimum 4 days per week (2-3 days on-site). The start date of this internship is February 2026 (or sooner).
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Other requirements you need to meet
About ASML
ASML is a leading supplier of lithography equipment, used by the world’s top chipmakers to print microchips that are increasingly powerful, fast and energy efficient. Working at ASML is inspiring, no matter what field you're in. That’s because we push the boundaries of technology: if it’s moving the world forward, chances are, we’re behind it. In fact, we’re probably a part of the electronic device you’re using right now. We’re a global team of more than 32,000 people from 122 different nationalities and counting. Headquartered in Europe’s top tech hub, the Brainport Eindhoven region in the Netherlands, our operations are spread across Europe, Asia and the US.
We're moving technology forward
In fact, we’re probably a part of the electronic device you’re using right now. Our lithography technology is fundamental to mass producing semiconductor chips. With it, the world’s top chipmakers are creating microchips that are more powerful, faster and energy efficient.
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