Physics | Engineering internship: characterization of vacuum seals materials

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Introduction

Control of contaminants is a major challenge to secure optics life time in EUV lithography systems. One of the major sources of contaminants is air permeation through elastomer seals. These contaminants also end up in the vacuum chamber of the scanner where they affect the expensive optics, the requirements on leak tightness for seals becomes increasingly important, and precise knowledge on permeation of the used materials is key. To develop systems with predictable performance, accurate characterization of permeation through materials according the ASML application are needed. This internship assignment concerns the qualification of permeation of various vacuum seals and seals-materials under different conditions and different gasses. You will be part of the Vacuum Systems group within the EUV department of ASML.

Your Assignment

In this Internship assignment you will:

• Adapt the existing setup to perform characterization measurements of O-ring permeation measurements according to ASML standards;
• Develop a procedure to execute the measurements (including loading and conditioning of the sample) and calibration of the setup for He, O2 and N2 measurements using different calibrated leaks, finding the typical time to achieve (constant) maximum permeation for the different materials in the specified O-ring sizes and their relation to compression;
• Make a measurement template;
• Make an accuracy calculation of the measurement;
• Measure various new materials for improved vacuum seal O-rings under different conditions, identify critical parameters and sensitivities;
• Advise on the use of these O-ring materials in ASML vacuum applications;

This is a Bachelor or Master graduation/apprentice internship for around 6 months, working minimum 4 days per week. The start date of this internship is as soon as possible.

Your Profile

To be a fit for this assignment, you:

• Are busy with your bachelor's or master's in Physics, Mechanical Engineering, Materials Science, Chemical Engineering, or related;
• Have some affinity with vacuum technology and materials science;
• Have some hands-on experience with experiments;
• Possess good analysis skills;
• Have good communication skills in English (verbal and written).

Other requirements you need to meet:

• You are enrolled at an educational institute for the entire duration of the internship;
• You are located in the Netherlands to perform your internship. In case you are currently living/studying outside of the Netherlands, your CV/motivation letter includes the willingness to relocate;
• If you are a non-EU citizen, studying in the Netherlands, your university is willing to sign the documents relevant for doing an internship (i.e., Nuffic agreement).

This position requires access to controlled technology, as defined in the United States Export Administration Regulations (15 C.F.R. § 730, et seq.). Qualified candidates must be legally authorized to access such controlled technology prior to beginning work. Business demands may require ASML to proceed with candidates who are immediately eligible to access controlled technology.

Diversity and inclusion

ASML is an Equal Opportunity Employer that values and respects the importance of a diverse and inclusive workforce. It is the policy of the company to recruit, hire, train and promote persons in all job titles without regard to race, color, religion, sex, age, national origin, veteran status, disability, sexual orientation, or gender identity. We recognize that diversity and inclusion is a driving force in the success of our company.

About Us

ASML is a leading supplier of lithography equipment, used by the world’s top chipmakers to print microchips that are increasingly powerful, fast and energy efficient. Working at ASML is inspiring, no matter what field you're in. That’s because we push the boundaries of technology: if it’s moving the world forward, chances are, we’re behind it. In fact, we’re probably a part of the electronic device you’re using right now.

We’re a global team of more than 32,000 people from 122 different nationalities and counting. Headquartered in Europe’s top tech hub, the Brainport Eindhoven region in the Netherlands, our operations are spread across Europe, Asia and the US.