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DUV Defectivity Performance Engineer

Baan in Veldhoven, Nederland

Soort opleiding





Engels (Vloeiend)
Nederlands (Vloeiend)

Werk ervaring

2 tot 5 jaren

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At ASML, the yield of the DUV-scanners is of high importance for our customers. Any nanometer-scaled disturbance (particle, water droplet, bubble, etc.) needs to be prevented since it can cause a defect in the end-product. As defectivity performance engineer in D&E, you will be actively involved in the integration and qualification of the ASML DUV-scanners.

Job Mission

As a DUV defectivity engineer, you will develop and execute performance and diagnostic tests for the qualification of (sub)systems. You will create test plans, execute them, verify the measurement techniques, analyse and document the results and propose solutions to close performance gaps. You will investigate and model the behaviour of the ASML-scanners, in order to understand the root causes of various issues.

You will participate in defectivity projects that are responsible for the qualification of the scanner performance during the system integration phase and will be supporting manufacturing and the customers. This work will be in a dynamic environment: both on the topics that need to be worked on and the boundary conditions for the tests are changing often. Your will be working in multi-disciplinary teams, together with other projects responsible for hardware and software modules, system engineering and marketing.

Job Description

Linking macro-scale items (for example air/water flows) to nano-scale defects has proven to be challenging. Imagination, creativity, as well as analytical skills will be needed for both driving defectivity performance forward and do trouble-shooting in case of deviations. You need to be assertive while also being a team player and build on the knowledge and help from other specialists within the ASML community.

We are looking for an all-round defectivity engineer, who will participate in:

  • Development of new tests and execution of these tests (“hands-on work”) in the cleanroom.
  • Data analysis (preferably in Matlab), including the development of the analysis software itself. 
  • Supporting customer and factory issues and escalations.
  • Validation and setup of defect-inspection tools (SEM, wafer-inspection equipment).


A Masters degree in Material Science, (Applied) Physics, Chemical Engineering or Nano-technologies is required.


  • At least 2 years of work experience in other technical companies is required.
  • Experience with nano-particles and material failure mechanisms is desired.
  • Knowledge of semiconductor industry, ASML-scanner, defect metrology equipment, statistics and/or design of experiments is preferred.
  • Experience with Matlab is a plus.

Personal skills

  • Team player with good communication skills.
  • Pragmatic, innovative, highly committed and flexible.
  • Excellent analytical skills.
  • Excellent verbal and written communication skills in English.
  • Willingness to work in cleanroom environment.
  • Willingness to travel.

We make machines that make chips; the hearts of the devices that keep us informed, entertained and safe. Our key technology is the lithography system, which brings together high-tech hardware and advanced software to control the chip manufacturing process. All of the world’s top chipmakers like Samsung, Intel and TSMC use our technology, enabling the waves of innovation that help tackle the world’s toughest challenges.

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