Physics | Mechanical Engineering internship: phase change tin pump

Be part of progress

Introduction

Join a multi-disciplinary team advancing EUV source technology as part of the Machine Conditioning Source department, where we are responsible for the general conditioning (thermal, gas, cooling) of the EUV source. Within this department, you will work on the design and industrialization of hardware supplying liquid tin to the source vessel.

Your assignment

The recent electronics shortage has driven the need for higher output in lithography systems. To enable higher throughput, higher EUV source powers are required. One bottleneck for higher source power is the feed pressure of the liquid tin supply. The liquid tin is used to create a constant stream of droplets to be hit by a high-power laser, which creates a hot plasma radiating EUV light. Higher pressure results in more droplets per second, producing more EUV light. The current system is pressurized by gas, but technical limits will be reached in the coming years. To enable higher pressures (>2000 bar), a new pressurization method is envisioned using the expansion of the tin solid-liquid phase change. By melting a fluid in a confined space, tremendous pressures can be achieved. This internship focuses on validating a practical way to harness this pressure.

With the support of experienced colleagues, you will integrate a test setup to validate the concept of a phase-change powered tin pump. You need to prove by analysis that the setup can create and withstand both the required temperatures (250°C) and pressures (>2000 bar). You will work in close collaboration with experienced designers and technology experts to develop enabling technology for the next generation of lithography tools.

Key deliverables include:

• Read up on the design and previous modeling
• Develop a validation test plan
• Oversee the integration of the tin pump in a test setup
• Measure the performance of the tin pump
• Perform data analysis on the measurements
• Compare measured results to models, identify discrepancies, and document your conclusions

This is a master (thesis or non-thesis) internship for a minimum of 6 months, at least 4 days per week (on-site). The start date is February 2026.

Your profile

• Background in (Applied) Physics or Mechanical Engineering
• Capable of devising practical tests and interpreting data
• Experience with simulation of non-linear materials or phase transitions (preferable)
• Ability to explain technical details to those unfamiliar with physics
• Critical of your own work and test results
• Excellent communication skills in English, both written and verbal

Other requirements you need to meet:

• You are enrolled at an educational institute for the entire duration of the internship
• You need to be located in the Netherlands to be able to perform your internship. In case you’re currently living/studying outside of the Netherlands, your CV/motivation letter should include your willingness to relocate.
• If you are a non-EU citizen studying in the Netherlands, your university must be willing to sign the documents relevant for doing an internship (e.g., Nuffic agreement).
• This position requires access to controlled technology, as defined in the United States Export Administration Regulations (15 C.F.R. § 730, et seq.). Qualified candidates must be legally authorized to access such controlled technology prior to beginning work. Business demands may require ASML to proceed with candidates who are immediately eligible to access controlled technology.

About ASML

ASML is a leading supplier of lithography equipment, used by the world’s top chipmakers to print microchips that are increasingly powerful, fast, and energy efficient. Working at ASML means pushing the boundaries of technology and being part of a global team of more than 32,000 people from 122 different nationalities. Headquartered in the Brainport Eindhoven region in the Netherlands, ASML’s operations span Europe, Asia, and the US.